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EPV presents further results using hollow cathode sputtering at the 52 nd American Vacuum Society International Conference

November 01, 2005 - Boston, MA, USA:

Drs. Sheyu Guo and Alan Delahoy of Energy Photovoltaics, Inc., presented a paper entitled “TiN and TiO2:Nb Thin-Film Preparation Using Hollow Cathode Sputtering with Application to Solar Cells” at the recent 52nd American Vacuum Society International Conference in Boston, MA. Dr. William Shafarman of the Institute of Energy Conversion at the University of Delaware collaborated in certain aspects of the project. The paper is the third in a series dealing with reactive-environment hollow cathode sputtering (RE-HCS) and its applications. Using the RE-HCS method, high-quality, gold-colored films of titanium nitride were produced with low resistivity and high IR reflectance and were utilized as a back contact material for CIGS solar cells.

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